Introduction of Load Cells for Semiconductor Manufacturing Processes and Board Mounting Processes
TEAC Load Cell Features
- TEAC's load cells are used in the semiconductor manufacturing process, from crystal growth to reliability inspections.
Customized production is also available.
Lineup by Process
Ingot pulling
A polycrystal is melted in a quartz crucible and pulled while rotating the seed crystal rod to make a single crystal ingot (ingot pulling by the CZ method).
Applicable products: Single crystal growth load cell *This item is available only in Japan.
TT-XNⅡ / TT-XNⅡ(G)
TT-XNS / TT-XNS(G)
| Model | TT-XNⅡ (Atmospheric pressure type) TT-XNⅡ(G) (Atmospheric pressure gas purge type) |
TT-XNS (Atmospheric pressure type) TT-XNS(G) (Atmospheric pressure gas purge type) |
||
|---|---|---|---|---|
| Rated Capacity (R.C.) | Low capacity section: 100N | High capacity section: 500N | 20N - 500N | |
| Safe overload of 500% | 600N | 120% R.C. | ||
| Overload protection* | Equipped | Equipped | ||
| Weight (Approx.) | 8kg | 8kg | ||
| Accessory | φ6, 6-core shieded cable, 1m, NDIS plug-end | φ10, 6-core shielded cable, 0.5m, NDIS plug-end | ||
*Overload protection
- TT‐XNⅡ：
- Protecting the load cell with a mechanical stopper at approximately 120% load in the direction of gravity. In the opposite direction of gravity (pushing-up direction), the load transmission component will be disconnected from the load cell to protect the load cell.
- TT‐XNS：
- Protecting the load cell with a mechanical stopper between 110% to 120% load in the direction of gravity, and at approximately 120% load in the opposite direction (pushing-up direction).
Applicable products:For pulling large diameter silicon wafers
| Model | TU-PGRS☐☐N/KN-G |
|---|---|
| Rated Capacity (R.C.) | 2kN - 5kN |
| Type | Tension / Compression Load Cell |
| Merit | High precision |
| Dimensions |
Wafer polishing (polishing and lapping)
Used to control the pressing pressure when polishing (lapping and polishing) silicon wafers.
Measure the force of the table
Applicable products:Polisher
| Model | TC‐FR(T)☐☐N‐G6 | TC-NSRSP(T)☐☐N-G3 | TU-PGRS☐☐N/KN-G |
|---|---|---|---|
| Rated Capacity (R.C.) | 200N - 500N | 50N - 500N | 100N - 500N |
| Type | Compression Load Cell | Compression Load Cell | Tension / Compression Load Cell |
| Merit | Button type | Adopt thin-film strain gage formed by sputtering. High responsivity |
High precision |
| Dimensions | Dimensions | Dimensions |
Applicable products:Lapper
| Model | TU-GR☐☐KN-G | TU-NR-C☐☐KN-G | TU-MXR2(T)☐☐N-G3 |
|---|---|---|---|
| Rated Capacity (R.C.) | 5kN - | 1kN - | 100N - 500N |
| Type | Tension / Compression Load Cell | Tension / Compression Load Cell | Tension / Compression Load Cell |
| Merit | Shear beam-Type Deflection proof and fatigue proof |
Shear beam-Type Deflection proof and fatigue proof |
For small polishing equipment |
| Dimensions | Dimensions | Dimensions |
Wafer inspection (prober)
Used for load control when testing the electrical characteristics of chips formed on wafers.
Probe card load management
Applicable products
| Model | TU-GR☐☐KN-G | TU-NR-C☐☐KN-G | TU-CR(T)☐☐N/KN-G6 |
|---|---|---|---|
| Rated Capacity (R.C.) | 5kN - | 1kN - | 1kN・2kN |
| Type | Tension / Compression Load Cell | Tension / Compression Load Cell | Tension / Compression Load Cell |
| Merit | Shear beam-Type Anti‐eccentricity and fatigue resistance |
Sleek Design Shear beam-Type Anti‐eccentricity and fatigue resistance |
High precision, Beam-type |
| Dimensions | Dimensions | Dimensions |
Bonding
Used for load measurement at bonding.
Applicable products:Chip on board
| Purpose | Pressures | Pressures | Pressures | Pressures |
|---|---|---|---|---|
| Model | TC-USR(T)29☐☐N-G3 | TC-NSRSP(T)☐☐N-G3 | TC-SR(T)50N-G | TC-SR(T)100N-G3 |
| Rated Capacity (R.C.) | 50N・100N | 50N・100N | 50N | 100N |
| Type | Compression Load Cell | Compression Load Cell | Compression Load Cell | Compression Load Cell |
| Merit | With stopper High performance |
High responsivity Adopt thin-film strain gage formed by sputtering. |
Button type | Button type |
| Dimensions | Dimensions | Dimensions | Dimensions |
| Purpose | Wire Tensile Strength |
|---|---|
| Model | TU-MBR(T)☐☐N-G3 |
| Rated Capacity (R.C.) | 2N・5N・10N・20N |
| Type | Tension / Compression Load Cell |
| Merit | Safe Overload Rating |
| Dimensions |
Applicable products:Flip Chip Bonder/Die Bonder
| Purpose | Pressures | Pressures | Pressures |
|---|---|---|---|
| Model | TC-NSRSP(T)☐☐N-G3 | TC-SR(T)☐☐N-G | TC-MFSR(T)☐☐N-G |
| Rated Capacity (R.C.) | 50N・100N | 20N・50N | 20N・50N |
| Type | Compression Load Cell | Compression Load Cell | Compression Load Cell |
| Merit | High responsivity Adopt thin-film strain gage formed by sputtering. |
Button type | Flat load point |
| Dimensions | Dimensions | Dimensions |
Test equipment (IC test handler)
Used for load control of IC test handlers.
Applicable products:
| Model | TC-NSRSP(T)☐☐N-G3 | TC-SR(T)☐☐N-G | TC-SR(T)100N-G3 |
|---|---|---|---|
| Rated Capacity (R.C.) | 50N・100N | 20N・50N | 100N |
| Type | Compression Load Cell | Compression Load Cell | Compression Load Cell |
| Merit | High responsivity Adopt thin-film strain gage formed by sputtering. |
Button type | Button type |
| Dimensions | Dimensions | Dimensions |
Surface Mounter
Used for load control of chip mounters to place electronic components on printed circuit boards
Applicable products
| Model | TC-SR(T)☐☐N-G | TC-MFSR(T)☐☐N-G | TC-USR(T)29☐☐N-G3 |
|---|---|---|---|
| Rated Capacity (R.C.) | 20N・50N | 20N・50N | 20N・50N |
| Type | Compression Load Cell | Compression Load Cell | Compression Load Cell |
| Merit | Button type | Flat load point | With stopper |
| Dimensions | Dimensions | Dimensions |
Liquid medicine management
Manages the remaining amount of liquid and gas cylinders.
Applicable products:Floor Scale
TL-LF
| Model | TL-LF |
|---|---|
| Weight (Approx.) | 0.4kg |
| Rated Capacity (R.C.) | 0.6/1/3kg |
| Safe overload | 120% |
| Merit | Small |
| Dimensions |
TL-PM
| Model | TL-PM12 | TL-PM18 | TL-PM21 |
|---|---|---|---|
| Weight (Approx.) | 0.7kg | 1.4kg | 1.7kg |
| Rated Capacity (R.C.) | 10/20/50kg | ||
| Safe overload | 150% | ||
| Merit | Small | ||
| Dimensions | |||
TL-PS
| Model | TL-PS18 | TL-PS21 | TL-PS25 | TL-PS28 |
|---|---|---|---|---|
| Weight (Approx.) | 2.0kg | 2.7kg | 3.8kg | 4.5kg |
| Rated Capacity (R.C.) | 10/20/50kg | 20/50/100/200kg | ||
| Safe overload | 150% | |||
| Merit | Standard type | |||
| Dimensions | ||||
| Model | TL-PS33 | TL-PS42 |
|---|---|---|
| Weight (Approx.) | 6.2kg | 11.1kg |
| Rated Capacity (R.C.) | 50/100/200kg | 100/200/300kg |
| Safe overload | 150% | |
| Merit | Standard type | |
| Dimensions | ||
